How brachiopods get covered with nanometric silicon chips
نویسندگان
چکیده
منابع مشابه
Nanoslits in silicon chips.
Potassium hydroxide (KOH) etching of a patterned [100] oriented silicon wafer produces V-shaped etch pits. We demonstrate that the remaining thickness of silicon at the tip of the etch pit can be reduced to approximately 5 microm using an appropriately sized etch mask and optical feedback. Starting from such an etched chip, we have developed two different routes for fabricating 100 nm scale sli...
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ژورنال
عنوان ژورنال: Proceedings of the Royal Society B: Biological Sciences
سال: 2004
ISSN: 0962-8452,1471-2954
DOI: 10.1098/rsbl.2004.0226